With the long experience in the manufacture of automobile compressors, Toyota Industries Corporation has successfully incorporated unsurpassed technological know-how in the design of dry vacuum pumps.
· Improvement of powder handling by adopting new developed rotor.
· Improvement of byproduct removal by optimizing N2 purge flow.
· Improvement of restartibility after shutdown by increasing the startup torque with motor motion control.
· Precise temperature control to reduce byproduct deposition.
· Adoption of roots technology to minimize power consumption.
· Best-in-class low power consumption due to adoption of high efficiency motor and reduction of mechanical loss
· Compact and light-weight design by 3D/CAD cultivated through automotive technology
· Best-in-class compact footprint achieving effective utilization of Fab space.
· Best-in-class quietness due to adoption of noise reduction technology cultivated through automotive technology
· Low vibration design suitable for cleanroom environments.
