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| Dry Vacuum Pump > Dry Pump Series > T
Series |
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| |
Full lineup with variable pumping speed of 1,670-30,000L/min.,
allowing improvement of byproduct removal for harsh CVD processes. |
Pump model |
Unit |
T100P-H |
T600-H |
T1000-H |
T1200-H |
T1800-H |
| Application |
|
Light - Harsh process |
Harsh process |
| Peak pumping speed |
m3/h |
100 |
300 to 600 |
600 to 950 |
600 to 1,200 |
950 to 1,800 |
| L/min |
1,670 |
5,000to10,000 |
10,000to15,800 |
10,000to20,000 |
15,800to30,000 |
| Ultimate pressure |
Pa |
1.2(*1)/5.3(*2) |
0.13(*1)/0.93(*2) |
| Inlet flange |
|
NW50 |
NW80 |
ISO100 bolted |
ISO160 bolted |
| Exhaust flange |
|
NW25 |
NW40 |
| Power consumption (At ultimate pressure) |
kW |
1.3 |
1.6 |
1.7 |
| Dimensions(LxHxW) |
mm |
590x300x280 |
590x600x300 |
760x625x300 |
| Dimension |
|
|
|
|
|
|
| Weight |
kg |
110 |
220 |
230 |
240 |
| Sound level
(At ultimate pressure) |
dB(A) |
<55 |
<58 |
|
| Cooling water |
Connector |
Inch |
1/4 |
3/8 |
| Flow rate |
L/min |
>3.0 |
| Supply pressure |
kPaG |
300 to 700 |
| Temperature |
ºC |
10 to 25 |
| N2 purge |
Connector |
Inc |
1/4 (Compression fitting) |
| Flow rate |
slm |
7 to 50 |
| Supply pressure |
kPaG |
300 to 700 |
| Secondary evacuation |
Connector |
mm |
Ø50 |
| Flow rate |
m3/min |
>1.9 |
>2.21 |
>1.76 |
| Static pressure in duct |
PaG |
<-208 |
<-199 |
<-190 |
| Power Source |
Max. power capacity |
kVA |
4.6 |
9.2 |
| Number of phases/voltage/Frequency |
|
3phase/208V(*3) /50·60Hz |
| Environment |
Ambient temperature |
ºC |
15 to 30 |
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(*1) N2 Purge:0slm (*2) N2 Purge:35slm (*3) Acceptable fluctuation of voltage ±10%
Foreign Exchange and Foreign Trade Control : Products listed are subject to export approval of Japanese Foreign Exchange and Foreign Trade Control. Please contact our Sales Dept. prior to export business. |
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Copyright(c) 2008 TOYOTA
INDUSTRIES CORPORATION. All rights reserved. |
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